薄膜热电偶热氧化可靠性及结构优化

航空发动机涡轮叶片处于发动机温度最高的部位，将薄膜材料制备于待测物表面形成热电偶传感器，可及时有效的对涡轮叶片进行测温。薄膜热电偶多层膜间的热氧化界面扩散失效是导致薄膜可靠性不高的主要原因之一，基于Fick第二定律提出多层膜扩散可靠性模型，定量描述薄膜热电偶扩散失效机理，通过仿真计算，结合粒子群算法，以薄膜寿命最大为目标，寻优得到各膜层对应的最佳结构，为结构工艺上提高薄膜热电偶寿命的研究提供了一定的借鉴。

Thermal oxidation reliability and structure optimization of thin film thermocouple

The part of an aero engine with the highest temperature is the turbine blade. The film material is prepared on the surface of the object to be measured to form a thermocouple sensor, which can timely and effectively measure the temperature of the turbine blade. The diffusion failure of the thermal oxidation interface between multilayer films of thin film thermocoupleis one of the main reasons for the low reliability of thin film thermocouples. One of the main causes of the low reliability of thin film thermocouples is the diffusion failure of the thermal oxidation interface between multilayer layers. Based on Fick's second law, this paper proposes a diffusion reliability model of multilayer film to quantitatively describe the diffusion failure mechanism of thin film thermocouples. Through simulation calculation and particle swarm optimization, the optimal structure of each layer is obtained with the goal of maximizing the lifetime of thin-film, It provides a certain method reference for improving the lifetime of thin film thermocouple in structure and technology.