| 一种新型微谐振陀螺及其灵敏度改进型(英文) |
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| 引用本文： | 樊尚春,王路达,郭占社.一种新型微谐振陀螺及其灵敏度改进型(英文)[J].宇航学报,2010,31(10). |
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| 作者姓名： | 樊尚春 王路达 郭占社 |
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| 作者单位： | 北京航空航天大学仪器科学与光电工程学院,北京,100191;惯性科学与技术国防重点实验室,北京,100191;传感技术国家重点实验室,上海,200050 |
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| 基金项目： | 国家自然科学基金( 60927005); 领航基金( YWF-10-01-A17); 航空基金( 2008ZC51034) |
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| 摘 要： | 设计的新型微机械陀螺采用了谐振敏感原理,其具有直接准数字式频率输出、高灵敏度、结构设计灵活、自解耦等优点。由于灵敏度是谐振式陀螺的一个重要指标且对其他指标有重要影响,本文重点对其进行优化设计。从仿真结果可以看出,在保证其他性能的前提下,起始结构方案、改进结构方案1、改进结构方案2和最终方案的灵敏度值分别为0.080、0.210、0.341和0.5447Hz/(°/s)。通过对比可得,每次改进过程,灵敏度都有较大提高。经分析,驱动方向上DETF的振幅减到外质量块振幅的1.16×10-4。测量范围为±300°/s,在测量范围内,线性度为6.41×10-7。
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| 关 键 词： | 微陀螺 谐振式陀螺 双端固支音叉 灵敏度 |
Optimization of Sensitivity for a Novelly-Designed MEMS Resonant Gyroscope |
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| FAN Shang-chun,WANG Lu-da,GUO Zhan-she.Optimization of Sensitivity for a Novelly-Designed MEMS Resonant Gyroscope[J].Journal of Astronautics,2010,31(10). |
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| Authors: | FAN Shang-chun WANG Lu-da GUO Zhan-she |
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| Institution: | FAN Shang-chun1,2,3,WANG Lu-da1,GUO Zhan-she1,3 ( 1. School of Instrument Science and Opto-Electronics Engineering,Beihang University,Beijing 100191,China,2. Key Laboratory of Inertial Science and Technology for National Defence,3. State Key Laboratories of Transducer Technology,Shanghai 200050,China) |
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| Abstract: | This paper introduces a novel micro-electromechanical systems ( MEMS) vibratory rate gyroscope based on resonant sensing of the Coriolis force. Its advantages include a quasi-digital FM ( frequency modulation) output,high sensitivity,and flexible parameter design. As a whole,this structure is consisted of proof masses,frame suspensions,two-stage amplifying leverage mechanisms,double-ended tuning fork ( DETF) ,driving and checking combs. The simulation results show that,while other performances do not change... |
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| Keywords: | MEMS gyroscope Resonant gyroscope Double-ended tuning fork Sensitivity |
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