气固热耦合对微尺度气浮轴承微振动的影响

基于气体润滑理论和稀薄气体动力学，结合边界滑移和气固热耦合分析技术，研究考虑温度影响引起的气浮轴承气膜局部变形问题对气旋与微振动的影响。研究结果表明:气膜的最大形变量随温度升高呈线性增长；考虑热耦合的气旋移动速度要明显小于传统数值分析方法所得结果，且耦合条件下不同工作温度对气浮轴承微振动的影响也不相同；结合实验可得，随温度的升高，微振动强度逐渐降低，但温度升高并不改变其固有频率；不同气体环境影响着气旋的移动速度和微振动强度，其中分子数大小起主要影响作用。实际工作过程中应充分考虑环境因素带来的影响以减小微振动。 

Influence of gas-solid thermal coupling on micro-vibration of aerostatic bearing at micron scale

Based on gas lubrication theory and rarefied gas dynamics, and in combination with boundary slip and gas-solid thermal coupling analysis technology, the influence of local deformation of gas film on the gas-vortex and micro-vibration caused by temperature effect was studied. The research results show that: the maximum deformation variable of the gas film increases linearly with the temperature rise, considering that the gas-vortex movement velocity of thermal coupling is significantly smaller than the traditional numerical analysis method, under the coupling conditions, different operating temperatures have varied impact on the micro-vibration of the aerostatic bearing. With the increase of temperature, the micro-vibration intensity decreases, but the temperature increase does not change its natural frequency, and different gas environment influences the movement velocity and micro-vibration intensity of the gas-vortex, of which the molecular number plays a major role. The effect of environmental factors should be taken into account in the actual work process to reduce the micro-vibration.