| MOCVD法制备多层Ir涂层的显微结构 |
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| 引用本文： | 杨文彬,张立同,成来飞,华云峰,徐永东.MOCVD法制备多层Ir涂层的显微结构[J].固体火箭技术,2006,29(1):56-59. |
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| 作者姓名： | 杨文彬 张立同 成来飞 华云峰 徐永东 |
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| 作者单位： | 西北工业大学超高温结构复合材料国防科技重点实验室,西安,710072 |
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| 基金项目： | 国家科技攻关项目
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国家高技术研究发展计划(863计划) |
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| 摘 要： | 以三乙酰丙酮铱为先驱体,采用金属有机物化学气相沉积法,通过变温多次沉积在石英基片和热解碳层上制备出多层Ir涂层。XRD研究表明,Ir涂层呈多晶态。试样冲击断裂后,SEM观察横截面显示,涂层与基片以及涂层之间结合良好,无层间开裂发生。内层涂层虽然有孔隙缺陷,但经多次沉积,后继制备的涂层能很好地将其封填。
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| 关 键 词： | 铱涂层 金属有机物化学气相沉积 多层结构 |
| 文章编号： | 1006-2793（2006）01-0056-04 |
| 收稿时间： | 2005-01-18 |
| 修稿时间： | 2005-01-27 |
Micro-structure of multilayer Ir coatings prepared by MOCVD method |
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| YANG Wen-bin,ZHANG Li-tong,CHENG Lai-fei,HUA Yun-feng,XU Yong-dong.Micro-structure of multilayer Ir coatings prepared by MOCVD method[J].Journal of Solid Rocket Technology,2006,29(1):56-59. |
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| Authors: | YANG Wen-bin ZHANG Li-tong CHENG Lai-fei HUA Yun-feng XU Yong-dong |
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| Abstract: | Iridium tris-acetylacetonate taken as precurso r was multi-time deposited on the quartz and PyC substrates by using metal-organ ic chemical vapor deposition(MOCVD).Finally multilayer Ir coatings were prepar ed.XRD analysis shows that the iridium coatings present pure polycrystalline ph ase.After impact fracture test,SEM photographs show that there is no delaminat ion among interfaces of the multilayer coatings and substrates.The defects with in the Ir coatings during the deposition process can be sealed perfectly by the subsequent depositions. |
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| Keywords: | iridium coatings metal-organic chemical vapor deposition multilayer structure |
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