| 大量规则图形傅里叶频谱信息提取方法的研究 |
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| 引用本文： | 张广军,叶声华.大量规则图形傅里叶频谱信息提取方法的研究[J].北京航空航天大学学报,1992(2):25-29. |
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| 作者姓名： | 张广军 叶声华 |
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| 作者单位： | 北京航空航天大学自动控制系
(张广军)，天津大学精仪系(叶声华) |
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| 摘 要： | 在检测系统中,有效的被测信息提取方法是保证检测具有高精度和高效率的主要因素之一。本文提出了大量规则图形傅里叶频谱信息的有效提取方法——频谱点能量包络处理方法,为实现大量规则图形尺寸的高精度和高效率的检测奠定了理论基础。文中还就该方法的应用领域进行了展望。
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| 关 键 词： | 傅里叶变换 包络处理 CCD |
A STUDY ON THE METHOD FOR COLLECTING THE INFORMATION OF FTS FOR REGULAR PATTERNS |
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| Zhang Guangjun.A STUDY ON THE METHOD FOR COLLECTING THE INFORMATION OF FTS FOR REGULAR PATTERNS[J].Journal of Beijing University of Aeronautics and Astronautics,1992(2):25-29. |
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| Authors: | Zhang Guangjun |
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| Institution: | Zhang Guangjun(Dept. of Auto. Control)Ye Shenghua(Tianjin University) |
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| Abstract: | The efficient method for collecting trie information to be measured is one of the main factors that ensure the measuring system with high precision and efficiency.In this paper,the method for collecting the information of Fourier transform spectrum(FTS) for regular patterns,i.e.,the envelope processing method of the intensities of FTS for regular patterns,is proposed.It lays a theoretical foundation for measuring the sizes of regular patterns with high precision and efficiency.In the end,the field to which the method can be applied is predicted. |
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| Keywords: | Fourier transform envelope processing CCD |
| 本文献已被 CNKI 维普 等数据库收录！ |
