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钽的氮离子注入法研究
引用本文:黄云辉,李建萍.钽的氮离子注入法研究[J].南昌航空工业学院学报,1994(1):60-64.
作者姓名:黄云辉  李建萍
摘    要:实验研究证实,通过氮离子注入的方法对钽基材进行表面强化,可大大提高钽村的表层硬度及耐蚀性能。俄歇电子能谱及X射线衍射分析表明,Ta注入N+后生成了新相TaNo.1。

关 键 词:氮离子注入    硬度  耐蚀性能

On the Method of N-ion Implantation in Ta-Surface
Huang Yunhui, Li JianPing.On the Method of N-ion Implantation in Ta-Surface[J].Journal of Nanchang Institute of Aeronautical Technology(Natural Science Edition),1994(1):60-64.
Authors:Huang Yunhui  Li JianPing
Institution:Dept. of chemical Engineering
Abstract:In this paper, it has been shown that the hardness and the anti-corrosion properties of the Ta-surface will be greatly improved by use of the N-ion implantation. Analysis with the Auger electron spectroscopy and the X-ray diffraction has indicated the formation of a new phase TaN0.1 after this implantation.
Keywords:N-ion implantation  Tantanium  hardness  corrosion resistance  
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