5MHz空气隙石英谐振器的研制

通常的高精密石英谐振器采用的是电极膜直接被在石英晶体谐振片上,玻璃壳火封或冷压焊封装结构。本文介绍一种结构全新的高精密石英谐振器的设计、工艺和性能。它的电极膜是被在靠近石英晶体谐振片的上下二个电容器上,电极膜与谐振片形成空气隙形状,所以称为空气隙石英谐振器或无电极石英谐振器。它的外壳采用了密封性能很好的金属化氢焊和电子束焊封接装技术,使产品提高Q值和改进老化。尤其是石英晶体谐振片采用了SC切型进一步提高了短期频率稳定度和加速度灵敏度。

Development of 5MHz Air Gap Quartz Resonator

The electrodes of the traditional high precise quartz resonators were directly located on quartz vibrating surface and it's enclosures used glass fire-sealed or coldwelded encapsu lation. In this paper, a new design, technique and property of high precise quartz resonators is introduced. In this construction, the electrodes are lo- cated on both upper and under condensers that very close to the active surface of the wafer. The electrode and vibrating surface form a air gap. Then it is called air gap quartz resonator or "electrodeless" qu- artz resonator. It's enclosur is sealed by means of metallic seal and electron beam seal, thus increasing the Q factor and improving the aging. Especially, the use of SC cut quartz crystal further improves the short-term frequency stability and acceleration sensitivity.