| 基于FR4的多自由度电磁式扫描光栅微镜结构设计 |
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| 作者姓名： | 周原媛 袁幸权 温泉 卢国凤 李东玲 |
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| 作者单位： | 1.重庆大学光电工程学院 重庆 400030;2.重庆大学新型微纳器件与系统技术国防重点学科实验室 重庆400030;3.重庆大学光电技术及系统教育部重点实验室 重庆 400030 |
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| 基金项目： | 重庆市自然科学基金面上项目（cstc2020jcyj-msxmX0563）；重大科学仪器设备开发（2018YFF0011200） |
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| 摘 要： | 本文面向低成本、高可靠、便携式光谱分析检测设备的需要，提出了一种基于FR4（Flame Retardant，阻燃等级为UL94V-O的板材，4表示树脂为环氧树脂、增强材料为玻璃纤维布）复合材料的多自由度电磁驱动微型集成扫描光栅微镜新结构。通过多自由度结构设计，有效提升了微镜转动角度。建立了器件有限元仿真模型，开展了静力学、模态及谐响应分析。有限元分析结果表明：微镜能够在设定谐振模态下工作，其微镜与驱动线圈的位移比值为1.795，为大转角电磁式微型集成扫描光栅微镜设计提供了一种新方法。
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| 关 键 词： | 扫描光栅微镜 MEMS 电磁驱动 |
| 收稿时间： | 2023/3/4 0:00:00 |
| 修稿时间： | 2023/5/13 0:00:00 |
Structural design of electromagnetic scanning micromirror based on FR4 |
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| Authors: | ZHOU Yuanyuan YUAN Xingquan WEN Quan LU Guofeng LI Dongling |
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| Institution: | 1.College of Optoelectronic Engineering, Chongqing University, Chongqing 400030, China;2.National Key Laboratory of Fundamental Science of Novel Micro/Nano Device and System Technology,Chongqing University, Chongqing 400030, China;3.Key Laboratory of Optoelectronic Technology and System of the Education Ministry of China, Chongqing University,Chongqing 400030, China |
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| Abstract: | Aimed at the request of low-cost, high-reliability portable spectral analysis and detection equipment, this paper proposes a new structure of electromagnetic micro-integrated scanning grating micromirror based on composite material FR4. Through designing the multi-degree-of-freedom drive structure, which improves the rotation angle of the micromirror effectively. A finite element simulation model of the device is established. A series of simulation have been carried out in order to optimize the performance. The simulation results show that structure can work in the set resonance mode, and the displacement ratio of the micromirror to the driving coil is 1.795, which provides a new method for the design of large-angle electromagnetic micro-integrated scanning grating micromirrors. |
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| Keywords: | Scanning mirror MEMS Electromagnetic actuation |
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