光学非球面检测系统的精度仿真分析

在分析非球面检测仪的测量精度时，用一般的不确定度评定方法难于得到符合实际的结果。现采用计算机仿真分析的方法来分析其测量不确定度，以确保仪器研制的成功。结果表明，计算机仿真的确是一种既经济又高效的方法，在现代误差和精度理论中有重要的作用。

The accuracy simulation analysis of the measuring system of optical aspherical surface

When analyzing the measurement accuracy of the aspherical surfacemeasuring instrument,it is difficult to attain the results that fit on fact by means c{the general uncertainty analysis methods.To ensure the success of the research andmanufacture of instrument we evaluate the uncertainty of measurement by means ofcomputer simulation analysis method.The results show that computer simulation isindeed an economical and efficient analysis method that will play a more importantrole in the modern error and accuracy theory.