INVESTIGATION OF SENSITIVITY FOR SILICON MICROMECHANICAL TUNING-FORK GYROSCOPE

Sensitivity is crucial to micromechanical gyro performance. The paper discusses how quality factors, resonant frequencies, driven vibration amplitude and sensor size, affect sensitivity of micromachined tuning-fork gyro operating in an open-loop mode. The goal is to analyze gyro characteristics quantitatively and lay the foundation for the design of gyro, interface and control electronics.