石英半球谐振子精密加工技术探讨

半球谐振陀螺是一种高精度、高可靠性、长寿命的新型固体振动陀螺，应用前景广阔。作为半球谐振陀螺的核心零件，石英半球谐振子壁薄、形状复杂、对加工精度要求高、制造难度大，而这些因素是制约半球谐振陀螺研制的主要瓶颈。结合半球谐振陀螺的技术发展，分析了半球谐振陀螺的结构类型和特点，介绍了石英半球谐振子的粗磨成型、精密磨削、研磨抛光、化学腐蚀、质量调平、表面镀膜等加工方法及研究进展，提出了未来半球谐振陀螺的研究重点和建议。

Discussion on Precision Machining Technology of Quartz Hemispherical Harmonic Oscillator

Hemispherical resonator gyroscope(HRG) is a new type of solid vibrating gyroscope with high precision, high reliability and long lifetime. It has a wide application prospect. As the core part of HRG, quartz hemispherical harmonic oscillator has thin wall, complicated shape, high precision requirement and difficult manufacturing. This is the key to restrict the development of HRG. Based on the technical development of HRG, the structure types and characteristics of HRG are analyzed. The machining methods and research progress of quartz hemispherical harmonic oscillator, such as rough grinding forming, precision grinding, grinding and polishing, chemical corrosion, mass adjusting and surface coating, are introduced. At last, the emphases and proposal of HRG future study are proposed.