基于电子束蒸发沉积的曲面纳米薄膜均匀性研究

半球谐振子金属化是半球谐振陀螺研制过程中的重要环节，针对半球表面薄膜制备均匀性难以实现的问题，提出了一种将薄膜沉积实验和光学模拟相结合的方法。本文采用电子束蒸发技术在半球上沉积Au薄膜，利用台阶仪测量球面上不同位点的薄膜厚度，将平面上的膜厚等效为半球曲面上的膜厚，研究球面薄膜的均匀性，得出了在半球内外表面上薄膜的膜厚分布；同时对薄膜沉积均匀性进行光学模拟，将半球探测器上辐照度等效为实验中沉积所得到的薄膜厚度，计算得出的半球探测器上辐照度分布与实验测量结果一致性较好，可为半球谐振子纳米薄膜的均匀性制备提供理论基础。

Uniformity of curved nanofilms based on electron beam evaporation deposition

Hemispherical resonator metallization is an important part in the manufacturing process of hemispherical resonator gyro, Aiming at the problem that the uniformity of hemispherical surface film preparation is difficult to achieve, a method combining film deposition experiment and optical simulation is proposed. In this paper, the Au film is deposited on the hemisphere by electron beam evaporation technique. The thickness of the film at different sites on the spherical surface is measured by Probe surface profiler, and the film thickness on the plane is equivalent to the film thickness on the hemispherical surface, so the uniformity of the spherical film is studied and the film thickness distribution of the film on the inner and outer surfaces of the hemisphere is obtained. At the same time, the uniformity of film deposition is optically simulated, and the irradiance on the hemispherical detector is equivalent to the film thickness obtained by the deposition in the experiment. The upper irradiance distribution calculated on hemispherical detector is in good agreement with the experimental measurements, which can provide a theoretical basis for the uniformity preparation of the hemispherical resonator nano-film. Keywords: Hemispherical resonator; electron beam evaporation; spherical surface; uniformity; optical simulation; nanofilm