| AFM电场诱导氧化加工技术制备微纳米结构 |
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| 引用本文： | 胡克想,王庆康,胡晓东.AFM电场诱导氧化加工技术制备微纳米结构[J].航空精密制造技术,2012,48(3):1-4,13. |
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| 作者姓名： | 胡克想 王庆康 胡晓东 |
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| 作者单位： | 1. 上海交通大学薄膜与微细技术教育部重点实验室,微米/纳米加工技术国家重点实验室,上海200240
2. 天津大学精密测试技术及仪器国家重点实验室,天津,300072 |
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| 基金项目： | 上海市科学技术委员会国际合作项目 |
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| 摘 要： | 大气状态下利用接触模式原子力显微镜(AFM)动态电场和静态电场及轻敲模式AFM静态电场制备了一维纳米光栅,对纳米光栅结构的特征进行了比较并对电场诱导阳极氧化加工的机理作了相应的理论分析。
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| 关 键 词： | 调制电场 静电场 接触模式 轻敲模式 阳极氧化 纳米光栅 |
Preparation of Micro/Nanostructures by AFM Field-induced Oxidation |
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| HU Ke-Xiang
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WANG Qing-Kang
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HU Xiao-Dong.Preparation of Micro/Nanostructures by AFM Field-induced Oxidation[J].Aviation Precision Manufacturing Technology,2012,48(3):1-4,13. |
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| Authors: | HU Ke-Xiang WANG Qing-Kang HU Xiao-Dong |
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| Institution: | 1.Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education,National Key Laboratory of Micro/Nano Fabrication Technology,Shanghai Jiao Tong University,Shanghai 200240; 2.State Key Laboratory of Precision Measurement Technology and Instruments,Tianjin University,Tianjin 300072) |
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| Abstract: | One-dimensional nano-gratings are prepared by using contact mode atomic force microscopy(AFM)under the dynamic electric field and electrostatic field and using tapping mode AFM under the electrostatic field in atmospheric conditions.The characteristics of nano-grating structures are discussed and the processing mechanism of electric field-induced anodic oxidation is analyzed correspondingly.Nanofabrication with tapping mode AFM shows that modulation of the tip not only reduces the impact of lateral force,which will get narrower line width,but also accelerates the growth rate of oxide,which will increase the line height and improve the processing efficiency. |
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| Keywords: | modulating electric field electrostatic field contact mode tapping mode anodic oxidation nano-gratings |
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