| 横向剪切干涉检测非球面波前数值模拟 |
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| 引用本文： | 王起维,孙涛,肖虹,韩成顺,董申.横向剪切干涉检测非球面波前数值模拟[J].航空精密制造技术,2012,48(4):12-14. |
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| 作者姓名： | 王起维 孙涛 肖虹 韩成顺 董申 |
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| 作者单位： | 1. 哈尔滨工业大学精密工程研究所,哈尔滨,150001
2. 中国工程物理研究院机械制造工艺研究所,绵阳,621900 |
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| 摘 要： | 横向剪切干涉检测方法用于非球面加工过程中检测是经济且高效的方法。从数值模拟的角度,分析了基于像差最小原则的非球面度;模拟了非球面波前的横向剪切干涉图,并利用基于Zernike多项式拟合的最小二乘法进行了波前重建数值模拟,给出了数值模拟结果,为该方法的实际应用提供了理论依据。
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| 关 键 词： | 非球面检测 横向剪切干涉检测 非球面度 波前重建 数值模拟 |
Numerical Simulation of Lateral Shearing Interferometric Testing of Aspheric Wavefront |
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| Institution: | WANG Qi-wei,SUN Tao,XIAO Hong,et al.(1.Center for Precision Engineering,Harbin Institute of Technology,Harbin 150001; 2.Mechanical Manufacturing Technology Research Institute,China Academy of Engineering Physics,Mianyang 621900) |
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| Abstract: | Aspheric surface testing in the process of ultra precision machining has been research hotspot and difficulty of this research area.Lateral shearing interferometric testing method used for aspheric surface testing in machining process is both the economic and the highly effective method.From the point of view of the numerical simulation,asphericity based on the minimum aberration principle was analyzed.The lateral shearing interferogram of aspheric wavefront was simulated.The numerical simulation of wavefront reconstruction by using least square method based on the Zernike polynomials fitting was performed.The numerical simulation results were given.A theoretical basis was provided for the practical application of this method. |
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| Keywords: | aspheric surface testing lateral shearing interferometric testing asphericity wavefront reconstruction numerical simulation |
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