| 柔性热敏薄膜传感器阵列工艺研究 |
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| 引用本文： | 傅博,马炳和,邓进军,董拴成.柔性热敏薄膜传感器阵列工艺研究[J].航空精密制造技术,2011,47(4):1-3,14. |
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| 作者姓名： | 傅博 马炳和 邓进军 董拴成 |
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| 作者单位： | 西北工业大学陕西省微/纳米系统重点实验室,西安,710072 |
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| 基金项目： | 国家自然科学基金资助项目(No.50775188) |
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| 摘 要： | 分析了热敏薄膜传感器测量流场温度和壁面剪应力的原理,选择聚酰亚胺为衬底材料,金属镍为热敏材料,提出了一种电镀引线的柔性热敏薄膜传感器阵列结构及其制作工艺.经热敏性能测试,该柔性热敏薄膜传感器阵列结构简单,可贴附于高曲率复杂表面,实现非破坏动态流场参数测量.
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| 关 键 词： | 电镀 热敏薄膜传感器 柔性 壁面剪应力 |
Fabrication of Flexible Thermal Thin-film Sensor Array |
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| FU Bo,MA Bing-he,DENG Jin-jun,et al..Fabrication of Flexible Thermal Thin-film Sensor Array[J].Aviation Precision Manufacturing Technology,2011,47(4):1-3,14. |
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| Authors: | FU Bo MA Bing-he DENG Jin-jun |
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| Institution: | FU Bo,MA Bing-he,DENG Jin-jun,et al.(Key Laboratory of MEMS/NEMS of Shaanxi Province,Northwestern Polytechnical University,Xi'an 710072) |
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| Abstract: | The principle of flow field temperature measurement and wall shear stress measurement by thermal thin-film sensor were analyzed.The polyimide was chosen as substrate and Ni was chosen as thermal material.A flexible thermal thin-film sensor array structure and fabrication process including lead plating were developed.The sensor array can be attached on the complex surface of high curvature,to achieve non-destructive dynamic measurement of flow field parameters by thermal property testing. |
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| Keywords: | plating thermal thin-film sensor flexible wall shear stress |
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