| CF4/SF6反应气体对大气压等离子体温度的影响 |
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| 引用本文： | 王东方,金会良,金江,王波.CF4/SF6反应气体对大气压等离子体温度的影响[J].航空精密制造技术,2011,47(5):33-36. |
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| 作者姓名： | 王东方 金会良 金江 王波 |
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| 作者单位： | 哈尔滨工业大学精密工程研究所,哈尔滨,150001 |
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| 摘 要： | 为了探究CF4/SF6反应气体及其含量对大气压等离子体的温度的影响规律,采用红外热像仪记录等离子体反应区域的温度.实验结果表明在系统输入功率为260W时,对于CF4气体,等离子体区域的温度随着CF4含量的增加先升高然后降低；对于SF6气体,等离子体区域的温度随着SF6含量的增加而逐渐降低；在相同条件下,反应气体为SF6...
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| 关 键 词： | CF4/SF6 大气压等离子体 温度 红外热像仪 |
Research on the Influence of Reactive Gas CF_4/SF_6 upon the Temperature of Atmospheric Pressure Plasma Jet |
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| WANG Dong-fang,JIN Hui-liang,JIN Jiang,et al..Research on the Influence of Reactive Gas CF_4/SF_6 upon the Temperature of Atmospheric Pressure Plasma Jet[J].Aviation Precision Manufacturing Technology,2011,47(5):33-36. |
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| Authors: | WANG Dong-fang JIN Hui-liang JIN Jiang |
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| Institution: | WANG Dong-fang,JIN Hui-liang,JIN Jiang,et al.(Center of Precision Engineering,Harbin Institute of Technology,Harbin 150001) |
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| Abstract: | To research the rule of reactive gas CF4/SF6 and their concentration upon the temperature of the atmospheric pressure plasma jet,the infrared camera was used to record the temperature of the atmospheric pressure plasma jet.The experiment indicates that when the input power is 260W,for the gas CF4,with the increasing concentration of reactive gas,the temperature of the atmospheric pressure plasma jet firstly rises,and then drops;for the gas SF6,the temperature of the atmospheric pressure plasma jet goes down... |
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| Keywords: | CF4/SF6 atmospheric pressure plasma jet temperature infrared camera |
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