| 高端MEMS固体波动陀螺的发展与应用 |
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| 引用本文： | 权海洋,杨栓虎,陈效真,王浩.高端MEMS固体波动陀螺的发展与应用[J].导航与控制,2017(6):74-82. |
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| 作者姓名： | 权海洋 杨栓虎 陈效真 王浩 |
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| 作者单位： | 1. 北京微电子技术研究所,北京,100076;2. 兵器工业集团203研究所,西安,710065;3. 北京航天控制仪器研究所,北京,100039 |
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| 摘 要： | 总结了固体波动陀螺的发展历程,分析了从固体波动陀螺到MEMS陀螺的演化过程.通过对MEMS谐振环陀螺的演化与研制历程进行分析,预测未来高端MEMS陀螺发展方向,推动我国高端MEMS环形固体波动陀螺的研究与应用.
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| 关 键 词： | MEMS谐振环陀螺 固体波动陀螺 谐振盘DRG陀螺 |
Development and Application of Advanced MEMS Solid Wave Gyroscope |
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| QUAN Hai-yang,YANG Shuan-hu,CHEN Xiao-zhen and WANG Hao.Development and Application of Advanced MEMS Solid Wave Gyroscope[J].Navigation and Control,2017(6):74-82. |
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| Authors: | QUAN Hai-yang YANG Shuan-hu CHEN Xiao-zhen and WANG Hao |
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| Institution: | Beijing Microelectronics Technology Institute, Beijing 100076,The 203th Institute of China North Industries Group Corporation, Xi''an 710065,Beijing Institute of Aerospace Control Devices, Beijing 100039 and Beijing Microelectronics Technology Institute, Beijing 100076 |
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| Abstract: | The developing progress of solid wave gyroscope was summarized, and evolution from solid wave gyroscope to MEMS gyroscope was analyzed. This paper aims at forecasting the developing direction of MEMS gyroscope, promoting the investigation and implication of our national advanced MEMS ring solid wave gyroscope according to analyze the evolution and researching progress of MEMS ring vibrating gyroscope. |
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| Keywords: | MEMS vibrating ring gyroscope solid wave gyroscope disc resonator gyroscope |
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