石英MEMS陀螺漂移的周期性误差标定及补偿

实验发现石英系列微机电系统(MEMS,Micro Electromechanical System)陀螺仪零点漂移中含有很强的规律性误差,短时间高频采样尤为明显.为提高器件精度和系统性能,研究了其周期性误差各重要参数的特点,以误差分析理论分析了各误差传递系数,提出了一种精确标定方法.实验结果表明经过精确标定和补偿,进一步提高了器件精度和在线长时间补偿效果.说明了本精确标定方法具有良好的补偿效果. 

Calibration and compensation periodic error in quartz MEMS gyroscope drift

It was found in experiments that the drift of quartz series MEMS(micro electromechanical system)gyroscopes had good orderliness and periodicity against other series MEMS gyroscopes,especially in short-time and high frequency sampling.In order to improve the precision of the quartz gyroscope and the performance of the system,a precise calibration method was raised by studying each period's parameters as well as its error transfer coefficients according to error analysis theory.The experiment results not only demonstrate that the precision of the quartz MEMS gyroscopes is improved by the accurately calibrating but also testify that the obtained parameters values are applicable to compensation online in long subsequent time.It is extraordinarily necessary for the quartz series MEMS to process the precise periods calibration.