| 外差干涉测量系统的标定 |
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| 引用本文： | 于瀛洁,李鹏生.外差干涉测量系统的标定[J].宇航计测技术,1999,19(2):16-21. |
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| 作者姓名： | 于瀛洁 李鹏生 |
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| 作者单位： | 上海大学 |
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| 摘 要： | 对纳米级测量系统进行标定是一个难题。结合某一外差干涉测量系统，提出了一个对测量系统的分辨力、输入输出特性进行标定的简单易行的方法。
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| 关 键 词： | 外差法 干涉测量 标定 输入输出特性 分辨力 |
Demarcation for the measurement system of heterodyne interference |
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| Yu Yingjie\ Li Pengsheng\ Zhang Zhuo\ Qiang Xifu.Demarcation for the measurement system of heterodyne interference[J].Journal of Astronautic Metrology and Measurement,1999,19(2):16-21. |
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| Authors: | Yu Yingjie\ Li Pengsheng\ Zhang Zhuo\ Qiang Xifu |
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| Institution: | Yu Yingjie\ Li Pengsheng\ Zhang Zhuo\ Qiang Xifu |
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| Abstract: | It is a difficult to demarcate a measurement system which accuracy is within in nanometre order. Puts forward a simple method to demarcate the input output characteristic and resolution of the measurement system of heterodyne interference. |
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| Keywords: | Heterodyne method\ Interferometric measurement\ Demarcation Input output characteristic\ Resolution |
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