相位偏移干涉测量中移相误差补偿技术研究

 在相位偏移干涉测量技术中,一阶线性和二阶非线性移相误差是产生相位检测误差的主要因素。在研究移相误差对相位偏移干涉法测量精度影响的基础上,提出五步移相算法一阶线性和二阶非线性移相误差补偿技术。该方法从相位偏移干涉图中拟和出移相过程中存在的移相误差,对五幅算法结果进行误差修正。试验证明移相器存在 10%一阶线性误差和 1 %二阶非线性误差时,五幅算法相位检测误差为 0.12弧度;采用该补偿方法可以将相位测量精度减少到 0.02弧度,相当于采用氦氖激光器的倍程干涉仪中位移测量精度从 6.0 nm提高到 1 nm。

STUDY OF PHASE SHIFTING DEVIATION COMPENSATION TECHNOLOGY IN PHASE SHIFTING INTERFERENCE MEASUREMENT

In the Phase Shifting Interferometer, the lineal and non\|lineal phase shifting deviation is the main factor influencing the phase accuracy. On the basis of the study on measurement errors caused by phase shifting deviation, this paper puts forward a novel technology compensating the phase shifting error. The data resulting from the five steps method are corrected using the method which estimates the deviation of the phase shifting device. The experimentation proves that the combination of 10% lineal and 1% non\|lineal phase shifting errors will produce 0.12 radian of phase error, and the results will be decreased to 0.02 radian using the phase compensation method presented in this paper, which means the displacement error can be reduced to 1.0 nm from 6.0 nm in the double pass interferometer with stabilized 632.8nm He\|Ne laser.