纳米多层膜力学性能研究进展

本文综述了近年来国内外得对纳米多层膜力学性能的研究结果，探讨了出现力学性能异常的机理，为设计新型的纳米多层膜镀层提供理论依据。

Progress in Mechanical Properties of Nano-multilayer Thin Films

Mechanical properties of multilayer thin fil m s composed by alternating layers of two different materials vary with the change o f the modulation period.The supermodulus and superhardness effects are observed at a sp ecific range of modulation periods.Hence the mechanical properties of multilayer t hin films have been paid considerable attentions in recent years because of po tential technological applications and theoretical significance.The research res ults of mechanical properties of nano multilayer thin films are reviewed in this paper. The mechanism of t he mechanical property anomalies has been explored,which is useful for design of new types of nano multilayer thin films.