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低量程高精度应变式压力传感器研制
引用本文:于炜,杨梅,湛华海.低量程高精度应变式压力传感器研制[J].气动实验与测量控制,2009(4):69-72.
作者姓名:于炜  杨梅  湛华海
作者单位:中国空气动力研究与发展中心,四川绵阳621000
摘    要:为了提高低量程应变式压力传感器的精度,将测力轮毂应变梁与带中央硬芯的测压膜片相结合,构成了新颖的梁膜一体的弹性元件。通过有限元方法对弹性元件的结构参数进行匹配,找到了最佳参数值,并制作实物加以验证,表明所选参数是适当的,使传感器的精度得到了大幅度提高,满足了低量程压力范围内高精度测量的要求。同时该传感器具有结构简单、易于加工装配、成本低廉的特点,符合传感器技术发展的需要。

关 键 词:传感器  梁-膜结构  有限元法

The development of low range and high accuracy strain gauge pressure transducer
Authors:YU Wei  YANG Mei  ZHAN Hua-hai
Institution:(China Aerodynamics Research & Development Center,Mianyang Sichuan 621000,China )
Abstract:In order to improve the precision of low range and high precision strain gauge pressure sensors, a new beam-film structure was designed. The structure as an elastic element is made up of a wheel hub beam and a film with a center rigid core. We found the most appropriate structure parameters of the elastic element through finite element analysis and tested these parameters by an experiment on a real object. As a result, we achieved the conclusion that the parameters were appropriate and the performance of the sensor was greatly improved. The precision met the request of high precision measuring in low range. Also, the sensor has simple structure and low cost. These characters matched the trend of sensor technology development.
Keywords:transducer  beam-film structure  finite element method
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