MEMS陀螺仪的高精度标定方法

为了提高微机电(MEMS)陀螺仪的测量精度，研究了一种同时标定陀螺非正交误差和加速度敏感漂移误差的标定方法。设计了16位置的转台标定方案，分别以地球自转角速率和重力加速度作为角速率和加速度激励源，利用两组角速率数据迭代求解非正交误差和加速度敏感漂移误差，并以陀螺仪对地球自转角速率的敏感误差作为校正效果的评估依据。试验结果表明，该方法能够有效校正MEMS陀螺仪的非正交误差和加速度敏感漂移误差，提高了陀螺仪的测量精度，且易于工程实现。

High Precision Calibration Method for MEMS Gyroscope

In order to improve the measurement accuracy of micro-electro-mechanical system(MEMS) gyroscopes, an experimental method is studied to calibrate non-orthogonal errors and acceleration-sensitive drift errors at the same time. The method designs a 16-position turntable calibration test, using the earth''s rotation angular rate and gravitational acceleration as the angular rate and acceleration excitation sources, the non-orthogonal error and acceleration-sensitive drift error are iteratively solved using two sets of angular rate data, the measurement error of the gyroscope to the earth''s rotation angular rate is used as the basis for evaluating the correction effect.The experimental results show that this method can effectively correct the non-orthogonal error and the acceleration-sensitive drift error of the MEMS gyroscope, improve the measurement accuracy of gyroscope, and is easy to implement in engineering.