| 比对法真空计量标准装置的研制 |
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| 引用本文： | 刘强,李正海.比对法真空计量标准装置的研制[J].宇航计测技术,1992(6):70-73. |
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| 作者姓名： | 刘强 李正海 |
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| 作者单位： | 兰州物理研究所 工程师 |
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| 摘 要： | 比对法真空计量标准装置是一种结构简单、操作方便、检定效率高、实用性强的二等真空标准装置。主要技术要求完全符合国际标准化组织(ISO)和国内有关真空标准的规定,尤其适用于真空计量二级站和一些基层单位大量常规校准,校准范围为10~5～10~(-4)Pa,总不确定度小于10％。在10~(-4)Pa范围内,压力的稳定度好于1％,在1～10~5Pa范围内,压力的稳定度好于0.5％。该标准装置的极限压力达10~(-6)pa。
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| 关 键 词： | ~+比对 真空计量 标准 压力测量 |
Development of the vacuum comparison standard apparatus |
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| Liu Qiang,Li Zhenghai,and Li Detian.Development of the vacuum comparison standard apparatus[J].Journal of Astronautic Metrology and Measurement,1992(6):70-73. |
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| Authors: | Liu Qiang Li Zhenghai and Li Detian |
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| Abstract: | The vacuum comparison standard apparatus is a secondary vacuum standard which is simple in structure, easy to operate, efficient in calibration and very practical. Its main technical specification fully conform to ISO and national standards. This vacuum standard apparatus is suitable for a lot of routine calibration in the second-level measurement stations and some basic units,with calibration range of 10~5~10~(-4)Pa and total uncertainty below 10%. The stability of pressure is better than 1% in the range of 10~(-4)~1 Pa, and 0.5% in the range of 1~10~5Pa. The limiting pressure of the standard apparatus is up to 10~(-6)pa. |
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| Keywords: | Comparison Vacuum measurement Standard Pressure measurement |
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