| 深微孔内径测量技术研究 |
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| 引用本文： | 云鹏,周彩红,梁雅军,刘柯,王晓宁.深微孔内径测量技术研究[J].宇航计测技术,2012,39(4):6-9. |
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| 作者姓名： | 云鹏 周彩红 梁雅军 刘柯 王晓宁 |
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| 作者单位： | 北京航天计量测试技术研究所,北京100076 |
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| 摘 要： | 介绍了一种基于高准确度电感传感器和红宝石测头,在测长机上实现深微孔径测量的方法,解决了内径的Φ1mm～Φ5mm、深度在40mm以下的深微孔内径的测量问题。通过对深微孔径测量装置测量不确定度的分析,在95%置信概率下,装置的测量不确定度为0.6μm,满足测量要求。
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| 关 键 词： | 深微孔径测量 电感传感器 红宝石测头 |
Researches on Measurement Technology of Micro-and-deep Aperture |
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| YUN Peng,ZHOU Cai-hong,LIANG Ya-jun,LIU Ke,WANG Xiao-ning.Researches on Measurement Technology of Micro-and-deep Aperture[J].Journal of Astronautic Metrology and Measurement,2012,39(4):6-9. |
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| Authors: | YUN Peng ZHOU Cai-hong LIANG Ya-jun LIU Ke WANG Xiao-ning |
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| Institution: | (Beijing Aerospace Institute for Metrology and Measurement Technology,Beijing 100076) |
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| Abstract: | The micro-and-deep aperture measurement method on length measuring machine using high accuracy inductance transducer and ruby probe is introduced.This method can measure the micro-and-deep aperture range from Φ1mm toΦ5mm and below 40mm height.When the confidence probability is 95%,the measurement uncertainty of this device is 0.6μm.The analysis result can meet these demands of measurement. |
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| Keywords: | Measurement of micro-and-deep aperture Inductance sensor Ruby probe |
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