微工程与惯性测量组件微型化发展研究

介绍了基于纳米技术的微工程领域的研究和发展情况,阐述了FPGA、ASIC、ASIS等典型集成逻辑器件设计技术和基于协同仿真、验证设计环境(CVE)进行虚拟样机设计开发的设计理念,介绍了MEMS的基础理论研究,总结了MEMS的技术特点和惯性测量组件微型化的发展趋势和优势.

Research about Micro-engineering and Micromation of Inertial Measure System

The development of micro-engineering based on nanotechnology are introduced. Some typical design of logic chips, like as FPGA,ASIC,ASIS, based on micro-engineering and some design ideas about dummy sample systems based on Co-Verification Environment/CVE are expounded in the paper. It also introduces research of elements theoretics about MEMS and summarizes the characteristic of MEMS technology, the development trend and the advantage of the inertial measure system micromation.