MEMS陀螺零偏温度补偿模型研究

针对MEMS陀螺工作易受温度变化影响、角速度测量输出误差大、预热时间长的问题，通过大量实验数据分析、总结规律，建立了零偏温度补偿模型，并结合最小二乘法利用多元线性回归技术对模型参数进行了辨识。对比零偏温度补偿前后的试验结果表明，经过补偿后的MEMS陀螺不但测量精度得到提高，其工程应用稳定性也得到增强。

Research on MEMS Gyro Bias Temperature Compensation Model

This paper has built a bias temperature compensation model and used multi-element linear regression method combined with least-square estimation to identify the model parameters through a great deal of experiment data analysis and regularity summarizing, aiming at problems like MEMS gyro is easily affected by temperature change when working, output error of angular velocity measurement and long warm-up time. The experiment result illustrates that accuracy of MEMS gyro measurement has been improved and meanwhile its engineering applying stability has been enhanced comparing with results of no temperature compensation.