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KDP晶体超精密加工机床静压主轴轴向变形分析
引用本文:赵自强,卢礼华,梁迎春,张龙江.KDP晶体超精密加工机床静压主轴轴向变形分析[J].航空精密制造技术,2010,46(2).
作者姓名:赵自强  卢礼华  梁迎春  张龙江
作者单位:哈尔滨工业大学,精密工程研究所,哈尔滨,150001
摘    要:通过建立KDP晶体超精密加工机床气体静压主轴的三维有限元模型,在考虑主轴装配的接触关系和螺钉预紧力的情况下,计算得到了主轴结构在工作状态下的变形.计算结果表明,由于结合面和主轴受拉伸长,轴承气膜间隙增大;气体压力导致止推板从中心到边缘发生翘曲变形,止推轴承的气膜为楔形.实验结果表明,有限元模型的计算误差小于11%.

关 键 词:气体静压主轴  有限元分析  轴承刚度

Analysis on Axial Deformation of the Aerostatic Spindle of Ultra-precision Machine Tool for KDP Crystal
Abstract:Three-dimensional finite element model of the aerostatic spindle of potassium dihydrogen phosphate (KDP) crystal ultra-precision machine tool was modeled. On the basis of considering the contact relation of spindle assembling and the pre-tightness force of bolts, the structural deformation of spindle under working conditions was gotten. The calculation results show that thrust bearing gas film gap is enlarged because junction surface and spindle are stretched. The action of gas pressure brings bending deflection from thrust plate's centre to its edge. The thrust bearing gas film is wedge. The experiment results indicate that the calculation error of finite element model is less than 11%.
Keywords:aerostatic spindle  finite element analysis  bearing stiffness
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