远场激光散射法测量高精度表面粗糙度研究

文本介绍一种通过对远场散射光的统计分析来测量高精度平面及球面粗糙度的新方法。采用一维CCD器件来探测散射光分布。实验结果表明,所选用的远场散射光分布特征参数与标准粗糙度Ra之间存在很好看相关系。

Measuring Roughness of Precision Surfaces by Far-field Laser Scatter

A newtmethod for measuriug roughness of precision plane and spherical surfaces is described. The method is based on the statistical analysis of the scattered light distribution on far-field. A linear CCD is used to detect the distribution of scattered light. Experimental results show that there is a good corrclation between distribution characteristic parameter of selected far-field scattered light and standardized roughness value Ra.