Co-deposition of Ir-containing Zr coating by double glow plasma |
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| Institution: | 1. Materials Science and Engineering, Indian Institute of Technology Patna, Bihta Kanpa Road, Bihta, Patna, Bihar 801103, India;2. Department of Metallurgical and Materials Engineering, Indian Institute of Technology Madras, Chennai 600036, India;1. School of Electronic Information and Electrical Engineering, Xiangnan University, Chenzhou 423000, PR China;2. National Engineering Laboratory for Modern Materials Surface Engineering Technology & The Key Lab of Guangdong for Modern Surface Engineering Technology, Guangdong Institute of New Materials, Guangzhou 510650, PR China;3. School of Chemistry and Engineering, Xiangnan University, Chenzhou 423000, PR China;1. Institute of Physics ASCR, Cukrovarnicka 10, 16200 Prague 6, Czech Republic;2. Research Center for Photovoltaics v, AIST, Tsukuba 305-8568, Japan;3. Faculty of Electrical Engineering, Czech Technical University, Technicka 2, 16627 Prague, Czech Republic;1. Key Laboratory of Transparent Opto-functional Inorganic Materials, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai, 201899, China;2. Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China;3. Institute of Physics of the Czech Academy of Sciences, 16200, Prague, Czech Republic;1. School of Materials Science and Engineering, Tianjin University, Tianjin 300072, China;2. Key Lab of Advanced Ceramics and Machining Technology of Ministry of Education, Tianjin University, Tianjin 300072, China;1. Univ. Bourgogne Franche-Comté, ICB-LERMPS, UMR 6303 CNRS, UTBM, 90000 Belfort, France;2. Ångström Laboratory, Uppsala University, 75121 Uppsala, Sweden;3. Univ. Bourgogne Franche-Comté, ICB-LTM, UMR 6303 CNRS, 71200 Le Creusot, France |
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| Abstract: | Ir–Zr co-deposition coatings with 71 at% Zr were deposited on graphite by double glow plasma at 1073–1123 K. The structure and composition of the coatings were confirmed by FE-SEM, XRD, XPS and EDS. The hardness and the elastic modulus of the coatings were estimated by nanoindentation instrument. The adhesion strength between the coating and the substrate was evaluated by a scratch tester. The results showed that the coating was composed of nanocrystalline grains with a size of 80–90 nm compared with 0.5 μm for the pure Ir coating. The fine grains of the coatings might be attributed to the additional Zr element. New phases IrZr and ZrC were formed due to the high content of Zr and high deposition temperature. The hardness and elastic modulus of the coatings were about 7.5 GPa and 388 GPa, respectively. The adhesive force between the coating and the substrate was about 10 N. |
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