利用静电双探针对辉光放电等离子体诊断分析

阐述了利用Langmuir双探针诊断等离子体参数的基本原理,对圆柱腔中的空气辉光放电等离子体进行了双探针诊断,通过实验测得伏安特性曲线,计算得出等离子体密度和电子温度。分析了密度参数变化与放电电流大小之间的关系。最后将诊断结果与准光腔系统进行比较,二者虽略有差别,但差别不大,且变化趋势一致。验证了采用本双探针系统诊断辉光放电等离子体密度的可靠性。

Diagnosis of Glow Discharge Plasma by Langmuir Double Probe

The principle of plasma diagnosis by Langmuir double-probe is described, and the parameters of glow discharge plasma are measured. Electron temperature and electron density are calculated according to the double-probe I-V characteristic curve, and the variations of electron density are analyzed as a function of discharge current. The diagnosed results are compared with results obtained from quasi-optical cavity, and they show good agreement with each other. They have negligible difference and are in agreement of same variation. The reliability and correctness of using Langmuir double-probe to diagnose glow discharge plasma are verified.