石英谐振式加速度计

介绍石英谐振式加速度计工作原理,分析影响元件Q值的因素,计算热弹耗散对Q值的影响,在元件结构中基于机械滤波原理设计振动隔离系统,并通过ANSYS计算验证隔离系统的有效性。最后对样机的性能进行测试,并将测试结果和计算结果进行比较。两者基本吻合,从而证明设计方法的正确性。

Quartz Resonant Accelerometer

This paper introduces the principle of quartz resonant accelerometer,analyzes the factor affecting the Q value of the sensing element,calculates the effect of thermoelastic dissipation,makes use of insulating system based on mechanical filter principle in the structure design,and confirms the validity of the insulating system through ANSYS program.Finally,experiments for the characteristics of the sample product are done.Compared with the calculation results, the test results are consistent.So the design method is correct.