| 薄膜测厚验证QCM质量敏感性的方法研究 |
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| 引用本文： | 田东波,于钱,闫少光,等.薄膜测厚验证QCM质量敏感性的方法研究[J].航天器环境工程,2008,25(5):444-446. |
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| 作者姓名： | 田东波 于钱 闫少光 等 |
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| 作者单位： | 1. 北京卫星环境工程研究所,北京,100094
2. 北京化工大学,化学工程学院,分子与材料模拟实验室,北京,100029 |
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| 摘 要： | 石英晶体微量天平(QCM)是测量气相薄膜沉积质量的精密仪器。QCM质量和频率的相互作用受到众多不确定因素的影响,因此需要进行验证以取得更为精确的结果。文章从石英晶片的基本理论出发,以薄膜测厚为基础,研究了气相沉积石英晶体微量天平差频变化率和沉积厚度变化率成线性关系,阐述了线性关系是验证石英晶体微量天平的关键,并对测厚验证质量敏感性的可行性进行了分析。
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| 关 键 词： | QCM 线性关系 质量敏感性 测厚 |
| 收稿时间： | 2008/7/16 0:00:00 |
| 修稿时间： | 2008/9/17 0:00:00 |
Determination of QCM mass sensitivity by measuring the thin-film thickness |
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| Tian Dongbo,Yu Qian,Yan Shaoguang and et al.Determination of QCM mass sensitivity by measuring the thin-film thickness[J].Spacecraft Environment Engineering,2008,25(5):444-446. |
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| Authors: | Tian Dongbo Yu Qian Yan Shaoguang and |
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| Institution: | Beijing Institute of Spacecraft Environment Engineering;Beijing Institute of Spacecraft Environment Engineering;Beijing Institute of Spacecraft Environment Engineering |
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| Abstract: | QCM is a precision mass detector for measuring the gas phase thin-film deposition. Because the correlation between frequency and mass can be affected by many uncertain factors, the sensitivity of QCM often plays an important role in securing accurate results. In this paper, from the QCM theory and the measurement of the thin-film thickness, the linear relation and the method for determination of the mass sensitivity of the gas phase thin-film QCM are discussed, where the linear relation is the key. The feasibility of the method based on the thickness measurement of the thin-film deposited on the sensor is discussed. |
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| Keywords: | QCM linear relation mass sensitivity thickness measurement |
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