Co/NM/FM(NiFe and Co)纳米多层膜的层间耦合效应

巨磁电阻自旋阀多层膜作为磁敏传感器材料与磁随机存储器(MRAM)材料，具有高的可靠性与灵敏度，在航空航天等高科技领域有着极大的应用前景。研究多层膜各层间的耦合效应与各层厚度、磁学性能之间的内在关系，对提高自旋阀的巨磁电阻效应、磁灵敏性等具有重要的作用。本研究采用磁控溅射沉积制备了(Cu／Co、Cu／NiFe，Ta／NiFe双层膜与Co／Cu／Co、Co／Cu／NiFe、Co／Ta／NiFe)三明治结构薄膜。采用振动样品磁强计对薄膜磁性、四探针法对薄膜磁阻性能进行了测试研究，采用洛仑兹电子显微镜法观察了薄膜的磁畴结构。研究结果表明，层间耦合效应不仅与非磁性中间层的厚度相关，而且与中间层材料的特性相关。磁阻与磁畴观察均表明层间耦合效应随中间层厚度的增加而减小，而Cu作为中间层的多层膜的层间耦合大于Ta作为中间层的层间耦合。

Interlayer Coupling of Co/NM/FM(NiFe and Co) Nano-Sandwich Films

Cu/Co, Cu/NiFe, Ta/NiFe bilayers and Co/Cu/Co, Co/Cu/NiFe, Co/Ta/NiFe sandwich films were deposited by a magnetron sputtering method. Magnetic properties were evaluated by VSM and spin valve magnetoresistance was investigated by a four-probe method to study the interlayer coupling of the two magnetic layers. It has been found that the interlayer coupling depended not only on the layer thickness of the nonmagnetic spacer but also on the nature of the spacer. The interlayer coupling was reduced as the spacer layer thickness increased. The result was consistent with those from observations of the magnetic domain for the trilayers by means of Lorentz Electron Microscope. The trilayers with Cu spacer layer have shown a stronger coupling than those with Ta spacer layer.