Diamond Milling of Micro-Optics |
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Authors: | Sweatt WC Gill DD Adams DP Vasile M Claudet AA |
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Institution: | Sandia Nat. Labs., Albuquerque; |
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Abstract: | A diamond mill (a tiny end mill) can cut aspheric lenses and mirrors with diameters smaller than 0.5 mm. The cutting tool has a two-dimensional shape and is spun about the axis of the surface to be cut. As the spinning tool is plunged into the substrate, it cuts a radially symmetric surface to sub-micron accuracies. Commercially available circular diamond tools can be modified to aspheric shapes using a focused ion beam. Fabrication examples will be presented and the optical performance of an array of micro-lenses will be described. |
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