| 光学元件抛光亚表面损伤实验研究 |
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| 引用本文： | 刘志军,李圣怡,王卓,彭小强.光学元件抛光亚表面损伤实验研究[J].航空精密制造技术,2008,44(5). |
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| 作者姓名： | 刘志军 李圣怡 王卓 彭小强 |
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| 作者单位： | 国防科学技术大学机电工程与自动化学院,长沙,410073 |
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| 摘 要： | 设计光学元件抛光亚表面损伤检测实验,使用原子力显微镜(AFM)检测传统抛光亚表面塑性划痕与磁流变抛光亚表面塑性划痕的最大深度,通过比较验证磁流变抛光对亚表面塑性划痕的抑制能力;同时利用二次离子质谱仪的深度剖析功能检测磁流变抛光石英样件后表面水解层的深度,指出磁流变抛光属于低损伤性抛光技术。
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| 关 键 词： | 磁流变抛光 传统抛光 亚表面损伤 |
Research on the Subsurface Damage during Finishing for Optics |
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| LIU Zhi-jun LI Sheng-yi WANG Zhuo.Research on the Subsurface Damage during Finishing for Optics[J].Aviation Precision Manufacturing Technology,2008,44(5). |
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| Authors: | LIU Zhi-jun LI Sheng-yi WANG Zhuo |
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| Abstract: | Designing measured experiment about the subsurface damage during finishing for optics,using atomic force microscope (AFM) measure the depth of subsurface cracks (SSD) through traditional finishing and magnetorbeological finishing (MRF),comparing the two results and verifying the ability of MRF on controlling SSD.We also measure the depth of hydrolyzed layer and make that compared with traditional finishing,magnetorheological finishing can bring shallower hydrolyzed layer but new impurity,belonged to low-damage finishing. |
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| Keywords: | magnetorheological finishing traditional finishing subsurface damage |
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