考虑微加工误差的微机械陀螺的健壮性优化

 为减小微加工误差对音叉振动式微机械陀螺设计性能的影响、提高其批量性能稳定性，以对其加工后性能变异影响最大的若干关键参数为设计变量，在分析了几何约束条件、模态性能约束条件、基于模态的加工灵敏度约束条件的基础上建立了微机械陀螺健壮性优化的数学模型。在无需事先知道微机械陀螺尺寸／性能的详尽统计信息的条件下，采用一阶摄动技术和遗传算法实现了微机械陀螺的健壮性优化设计。

Robust Optimization of Micromachined Gyroscope Considering Microfabrication Errors

In order to reduce the influence of microfabrication error on the design performance of a tuning fork vibratory micromachined gyroscope, and to enhance the performance robustness in the volume production environment, the limited key parameters with great influence on the fabricated performance stability are taken as the design variables at first, and then the constraint conditions of dimension, modal performance and mode-based microfabrication sensitivity are profoundly analyzed, and the mathematical model of the robust optimization of micromachined gyroscope is correspondingly established. The dimensional structural parameters of the microgyroscope are finally optimized by the first-order perturbation technology and genetic algorithm without knowing detailed statistical information on the uncertainties of dimension/performance of micromachined gyroscope in advance.