环形气囊抛光非均匀性的研究

针对环形气囊抛光光学元件表面时产生的抛光非均匀性现象,简要介绍了环形气囊抛光技术的运动方式和实验平台的主要组成部分。介绍了环形气囊的抛光机理,基于Preston方程,分析了抛光非均匀现象产生的原因和解决途径,通过调整环形气囊抛光头与工件之间的相对运动方式和调整环形气囊抛光头与工件之间的相对位置等两种方法,消除了工件中心抛光效果差的现象,实现了工件表面的均匀性抛光。

Research on Polishing Nonuniformity of Annular Bonnet Technology

Aiming at the problem of polishing nonuniformity in the annular bonnet polishing technology based on the Preston equation, the causes of polishing nonuniformity and the solutions are analyzed. In order to solve the problem of central polishing quality of parts center, the speed of the annular bonnet was adjusted, then the position was adjusted between the parts and the annular bonnet. The uniform polishing of parts surface is accomplished by annular bonnet polishing technology.