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Sweatt W.C. Gill D.D. Adams D.P. Vasile M. Claudet A.A. 《Aerospace and Electronic Systems Magazine, IEEE》2008,23(1):13-17
A diamond mill (a tiny end mill) can cut aspheric lenses and mirrors with diameters smaller than 0.5 mm. The cutting tool has a two-dimensional shape and is spun about the axis of the surface to be cut. As the spinning tool is plunged into the substrate, it cuts a radially symmetric surface to sub-micron accuracies. Commercially available circular diamond tools can be modified to aspheric shapes using a focused ion beam. Fabrication examples will be presented and the optical performance of an array of micro-lenses will be described. 相似文献
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