排序方式: 共有34条查询结果,搜索用时 15 毫秒
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ZHANG Yi-chen SUN Shao-ni ZHOU Yi MA Sheng-ge BA De-chun 《中国航空学报》2006,19(B12):119-125
Diamond-like carbon (DLC) films are deposited by the Hall ion source assisted by the mid-frequency unbalanced magnetron sputtering technique. The effects of the substrate voltage bias, the substrate temperature, the Hall discharging current and the argon/nitrogen ratio on the DLC film's performance were studied. The experimental results show that the film's surface roughness, the hardness and the Young's modulus increase firstly and then decrease with the bias voltage incrementally increases. Also when the substrate temperature rises, the surface roughness of the film varies slightly, but its hardness and Young's modulus firstly increase followed by a sharp decrease when the temperature surpassing 120 ℃. With the Hall discharging current incrementally rising, the hardness and Young's modulus of the film decrease and the surface roughness of the film on 316L stainless steel firstly decreased and then remains constant. 相似文献
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DU Xin-kang WANG Tian-min WANG Cong CHEN Bu-liang ZHOU Long 《中国航空学报》2007,20(2):140-144
Some fundamental studies on the preparation, structure and optical properties of NbN films were carried out. NbN thin films were deposited by DC reactive magnetron sputtering at different N2 partial pressures and different substrate temperatures ranging from –50 ℃ to 600 ℃. X-ray diffraction analysis (XRD) and scanning electron microscopy (SEM) were employed to characterize their phase com- ponents, microstructures, grain sizes and surface morphology. Optical properties inclusive of refractive indexes, extinction coefficients and transmittance of the NbN films under different sputtering conditions were measured. With the increase in the N2 partial pressure, δ-NbN phase structure gets forming and the grain size and lattice constant of the cubic NbN increasing. The deposited NbN film has relatively high values of refractive index and extinction coefficient in the wavelength ranging from 240 nm to 830 nm. Substrate tem- perature exerts notable influences on the microstructure and optical transmittance of the NbN films. The grain sizes of the δ-NbN film remarkably increase with the rise of the substrate temperature, while the transmittance of the films with the same thickness decreases. Ultra-fine granular film with particle size of several nanometers forms when the substrate is cooled to –50 ℃, and a remarkable aug- mentation of transmittance could be noticed under so low a temperature. 相似文献
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Thin silver films are deposited by radio frequency magnetron sputtering on glass ceramic at room temperature.Variations of sputtering power,bios voltage and power density are carried out for each deposition,then parts of as-deposited samples are subjected to annealing at 600 ℃ within a vacuum chamber.Structural properties are studied by X-ray diffraction(XRD),scanning electron microscope(SEM)and laser scanning confocal microscope(LSCM).It is shown that structural properties have a strong dependency on sputtering power and annealing temperature.Electrical contact resistance measured by a four point probe instrument is directly affected by the thickness of films.It is also found that the film conductivity,especially in thinner films,is improved by the increasing grain size.Finally,the film adhesion is observed by scratch tests.And the adhesive ability deposited by radio frequency magnetron sputtering shows a better performance than that produced by traditional methods. 相似文献
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为了得到在低能条件下更为精确的Ar~+和Xe~+轰击SiO_2的溅射模型,对已有化合物溅射模型进行调研分析,总结了3种溅射模型,分别为Pencil模型、Bach模型和Seah模型,并对其不足之处加以分析。在Seah模型基础上,对溅射阈值采用新的计算方法,并利用等效原子法改进溅射参数和表面键能的计算方法,形成改进后的新模型。结合已有的关于Ar~+和Xe~+法向轰击SiO_2的实验数据,对4种模型的计算结果进行对比分析。对于Ar~+和Xe~+法向轰击SiO_2,改进后的溅射模型的均方根误差最小,拟合优度最高,均优于其他3种模型。说明在低能状态下,采用改进后的模型可以更为精确地计算Ar~+和Xe~+轰击SiO_2的溅射率。 相似文献
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全固态薄膜锂电池研究进展和产业化展望 总被引:1,自引:0,他引:1
全固态薄膜锂电池利用固态电解质替代传统电解液,采用多层薄膜堆垛的平面结构,属于新一代的锂离子电池,在军民两用的可穿戴设备、便携式移动电源、汽车和航空动力电池等领域应用前景广阔。该类电池因高安全性、长循环寿命、高比容量和高能量密度等优势性能受到业界广泛关注。本文概述薄膜锂电池的分类和充放电原理,总结正负极、电解质薄膜材料的发展历程和薄膜制备手段的改进,对比各类电池材料的电化学性能,引入该方向最新的研究进展:三维薄膜锂电池,可变形的柔性电池,高电压、大容量电池组。汇总国外商用电池产品、关键优势技术、电池制备设备,提出薄膜锂电池亟待解决的科学问题和国内潜在的产业化方向。 相似文献
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直流磁控溅射ZnO:Al薄膜的光电和红外发射特性 总被引:6,自引:0,他引:6
以锌、铝合金(ω(Al)=3%)为靶材,利用直流反应磁控溅射法制备了系列掺铝氧化锌ZnO:Al(ZAO)薄膜样品,通过X射线衍射(XRD)、扫描电子显微镜(SEM)、分光光度计、霍耳效应及红外发射率测量仪等测试仪器或方法表征了样品的结构、形貌、光学、电学及红外发射特性.测得样品最低电阻率达到1.8×10-6(Ω·m),最大禁带宽度为3.47?eV,可见光区平均透过率达到90%,8~14?μm波段平均红外发射率在0.26~0.9之间.上述特性均随衬底温度和溅射功率的变化有着规律的变化.当方块电阻小于45?Ω时,薄膜在8~14?μm波段平均红外发射率与方块电阻遵循二阶函数变化规律. 相似文献
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