首页 | 本学科首页   官方微博 | 高级检索  
相似文献
 共查询到17条相似文献,搜索用时 241 毫秒
1.
单晶硅超精密切削表面质量各向异性的研究   总被引:1,自引:0,他引:1  
分析了单晶硅超精密切削时被加工晶面和滑移面间的相对关系以及单晶硅的力学特性,基于单晶硅超精密切削加工脆塑转变机理,模拟了分别以单晶硅(111)(、110)(、100)晶面为被加工面时的表面质量的各向异性特性。模拟结果表明这些晶面在不同晶向方向上表面质量呈现明显的各向异性特性,而以单晶硅(111)晶面作为被加工面时可以得到最好的加工表面质量。  相似文献   

2.
通过分析单晶硅的纳米印压试验结果以及显微压痕透射电镜观察结果,并结合尺度效应理论,提出了一种新的单晶硅超精密切削脆塑转变机理,建立了宏微结合的单晶硅超精密切削模型。首次基于理论分析的方法给出了较为精确的单晶硅脆塑转变的临界切削厚度,并通过试验对研究结果给予验证。  相似文献   

3.
为了研究微纳米尺度下单晶锗的力学特性,采用纳米压痕仪对单晶锗(100)(110)和(111)晶面进行了纳米压痕实验,并通过原子力显微镜对材料表面进行了观测。根据单晶锗各晶面的位移-载荷曲线,对单晶锗各晶面的弹性回复率、硬度、弹性模量与压入深度之间的关系进行了分析。结果表明:单晶锗在加载过程中分别经历了弹性变形、塑性变形和脆性变形三个阶段。当压入深度超过500 nm时,加载曲线上有突进点产生;当压入深度超过100 nm时,卸载曲线上有突退点产生。单晶锗的残余压痕形貌表现为凸起状,表明单晶锗具有较低的加工硬化趋势。当压入深度达到100 nm时,单晶锗表现出明显的尺寸效应,且单晶锗(111)晶面具有最低硬度和弹性模量值。表明相对于其他两个晶面,单晶锗(111)晶面具有更好的塑性变形能力。  相似文献   

4.
单晶硅纳米加工机理的分子动力学研究   总被引:5,自引:0,他引:5  
对内部无缺陷的单晶硅的纳米切削过程进行了分子动力学模拟.通过模拟结果,对单晶硅纳米切削中的切屑形成过程和加工表面的形成过程做出了合理的解释.并用第一原理应力计算方法对单晶硅纳米切削过程中的脆塑转变的可行性进行了研究.  相似文献   

5.
为针对提高太赫兹波透射率的需求,开展基于离子注入表面改性的脆性材料微结构超精密加工技术的研究,并将其应用于太赫兹波产生用磷化镓微棱锥结构的应用中。通过蒙特卡洛模拟指导注入参数,对比脆塑转变深度验证机械加工效果,成功加工出符合应用要求的微结构。通过光学测试,该方法能够有效提高加工效率,改善加工质量,实现对脆性光学材料的一次成型加工。  相似文献   

6.
首先从理论上分析了振动辅助抛光的加工过程,通过建立单颗磨粒冲击工件的数学模型,分析了振动参数变化引起硬脆材料的塑-脆去除方式转变机制。采用LY-DYNA软件对球形和锥形磨粒冲击工件的仿真分析结果表明:随着振动参数的增强,磨粒切入深度增加,达到临界切削深度后产生裂纹脆性去除,从而能够实现工件材料的额外去除。在实验平台上开展的径向振动抛光实验结果表明:引入振动后抛光去除效率显著提升,证明了理论分析的正确性。  相似文献   

7.
介绍了微结构功能表面加工中的问题,以同轴调制锯齿波微结构的金刚石超精密加工为例阐述了其加工原理,结合试验对刀具刀尖圆弧半径、被加工材料和切削液等切削条件与金刚石超精密切削加工后的微结构功能表面之间的关系进行了分析与讨论,并对主轴转速和刀具进给速度等切削用量与金刚石超精密切削出的微结构功能表面之间的关系进行了分析与讨论.  相似文献   

8.
闫艳燕  张亚飞  张兆顷 《航空学报》2021,42(7):624749-624749
为进一步揭示切向超声辅助磨削过程中硬脆材料的表面及亚表面损伤机理,基于应变率模型对其磨削过程中材料的动态力学性能进行分析,并在此基础上建立了硬脆材料的脆-塑转变临界切削深度模型与微裂纹损伤深度模型。研究发现,脆-塑转变临界切削深度和微裂纹损伤深度均与应变率有关,其中临界切削深度随着应变率的增加而增加,而横向裂纹损伤深度与中位裂纹损伤深度均随应变率的增加而减小。通过ZrO2陶瓷切向超声辅助磨削试验进行验证。试验结果表明:由于切向超声振动的引入提高了材料应变率,进而提高了材料的动态断裂应力以及动态断裂韧性,从而扩大了ZrO2陶瓷的塑性域去除范围,降低了加工表面的横向裂纹与中位裂纹损伤深度,使得ZrO2陶瓷的表面及亚表面质量得到明显改善。试验结果与理论分析相一致,为进一步揭示切向超声辅助磨削过程中硬脆材料的表面及亚表面微观损伤机理提供了理论参考。  相似文献   

9.
结合超精密切削的工艺特点,在分析超精密切削积屑瘤现象及成因的基础上,通过研究切削用量、刀具几何参数、切削液、刀具刃磨等因素对积屑瘤的影响机理,分析积屑瘤对超精密切削加工表面粗糙度、切削力和切削变形、切削振动的影响,并提出超精密切削条件下抑制积屑瘤的主要方法.  相似文献   

10.
实验表明磁流变抛光以其独特的剪切去除机理可用于光学元件亚表面损伤的去除,并且自身不产生新的划痕,同时还可提升光学元件的表面质量,可作为高效加工无损光学元件的一种工艺。  相似文献   

11.
为了探究红外光学材料多光谱CVD硫化锌的磨削加工去除机理,对抛光后的多光谱CVD硫化锌材料进行显微压痕和金刚石单颗粒刻划实验研究,并采用金刚石砂轮对材料进行磨削加工。实验研究表明,多光谱CVD硫化锌材料在机械去除过程中出现了弹性和塑性变形现象,萌生的裂纹和破碎主要沿晶界、刻划方向、磨削纹理方向扩展,小的压力可抑制裂纹的萌生和扩展,采用尖头金刚石颗粒可获得破碎和裂纹更少的表面,采用垂直磨削法,磨削后形成了自中心至外缘呈周期性、散射状的磨削纹理。本研究可为多光谱CVD硫化锌红外透镜的精密、超精密加工提供技术依据。  相似文献   

12.
《中国航空学报》2021,34(6):90-99
Based on the special physical–chemical characteristics of optical crystal in the field of aeronautics, a new anhydrous based shear-thickening polishing (ASTP) method has been proposed to restrain deliquescence and to improve physical properties for KDP machining. The ultra-precision polishing of KDP crystal is completed by ASTP. A kind of anhydrous based thickening polishing slurry (ATPS) was proposed in our work, and high-performance rheological properties were determined to achieve the ASTP of KDP crystal. A material removal model of ASTP in KDP machining is established, followed by the verification experiment of the prediction model. The maximum error of the predictive model is only 9.8%, which proves the validity of the material removal model for KDP polishing. The polishing experiments were carried out on the polishing platform developed by ourselves. The results show that the new polishing method can polish 20 mm × 20 mm × 5 mm KDP crystal and obtain a super-smooth surface with a surface roughness of 1.37 nm and high shape accuracy. The surface accuracy of polished KDP crystal reaches up to 0.68λ (RMS). The experimental results show that the ASTP is a potential ultra-precision machining method for KDP crystal.  相似文献   

13.
Ultra-precision machining causes materials to undergo a greatly strained deformation process in a short period of time.The effect of shear strain rates on machining quality, in particular on surface anisotropy, is a topic deserving of research that has thus far been overlooked.This study analyzes the impact of the strain rate during the ultra-precision turning of single-crystal silicon on the anisotropy of surface roughness.Focusing on the establishment of cutting models considering the tool rake angle and the edge radius, this is the first research that takes into account the strain rate dislocation emission criteria in studying the effects of the edge radius, the cutting speed, and the cutting thickness on the plastic deformation of single-crystal silicon.The results of this study show that the uses of a smaller edge radius, faster cutting speeds, and a reduced cutting thickness can result in optimally uniform surface roughness, while the use of a very sharp cutting tool is essential when operating with smaller cutting thicknesses.A further finding is that insufficient plastic deformation is the major cause of increased surface roughness in the ultra-precision turning of brittle materials.On this basis, we propose that the capacity of single-crystal silicon to emit dislocations be improved as much as possible before brittle fracture occurs, thereby promoting plastic deformation and minimizing the anisotropy of surface roughness in the machined workpiece.  相似文献   

14.
徐超  胡皓  彭小强  李信磊  林之凡 《航空学报》2021,42(10):524914-524914
采用超精密车削加工的复杂曲面铝反射镜只能满足红外光学系统的应用需求,若要满足更高需求的应用场合,需要进一步提升反射镜面形精度。磁流变抛光能够进行确定性修形,在复杂曲面加工中具有独特优势,但是复杂曲面连续变化的面形特征,在磁流变抛光时会导致去除函数不稳定,影响误差收敛效率和加工精度。从高精度复杂曲面铝反射镜的应用需求出发,提出了复杂曲面局部区域磁流变抛光去除函数的动态建模方法,给出了驻留时间求解算法,以平均曲率变化最小为原则,设计了抛光路径优化算法,针对该算法计算速度慢的问题,提出了优化策略,并通过试验进行了验证,最终加工的复杂曲面铝反射镜的面形误差为0.216λ PV、0.033λ RMS (λ=632.8 nm)。  相似文献   

15.
《中国航空学报》2023,36(6):402-419
Large-size thin-walled curved surface parts of pure iron are crucial in aerospace, national defense, energy and precision physical experiments. However, the high machining accuracy and surface quality are difficult to achieve due to the serious tool wear and deformation when machining the parts with conventional cutting tools. In this paper, an elliptical vibration cutting (EVC) with active cutting edge shift (ACES) based on a long arbor vibration device is proposed for ultra-precision machining the pure iron parts by using diamond tool. Compared with cutting at a fixed cutting edge, the influence of ACES on the EVC was analyzed. Experiments in EVC of pure iron with ACES were conducted. The evolutions of the surface roughness, surface topography, and chip morphology with tool wear in EVC with ACES are revealed. The reasonable parameters of ultra-precision machining the pure iron parts by EVC with ACES were determined. It shows that the ACES has a slight influence on the machined surface roughness and surface topography. The diamond tool life can be significantly prolonged in EVC of pure iron with ACES than that with a fixed cutting edge, so that high profile accuracy and surface quality could be obtained even at higher nominal cutting speed. A typical thin-walled curved surface pure iron part with diameter ∅240 mm, height 122 mm, and wall thickness 2 mm was fabricated by the presented method, and its profile error and surface roughness achieved PV 2.2 μm and Ra less than 50 nm, respectively.  相似文献   

16.
利用超精密机床进行切削加工时,对于操作者来说,首先面临的问题是最优切削用量组合的确定,这也是最让操作者感到棘手的问题.单晶硅成功的切削过程取决于优化工艺参数,比如进给量、背吃刀量、切削速度等.为了建立精确可靠的表面粗糙度预测模型,本文将遗传基因算法应用于回归分析,同时在超精密机床上对该预测模型进行了试验验证.  相似文献   

17.
简要介绍超精密抛光技术的发展动态,围绕精密研抛机的现有加工技术水平,开发可实现超精密抛光的控制力系统.  相似文献   

设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司  京ICP备09084417号