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1.
针对高分辨率微米光栅加速度计中存在的输出非线性和动态范围小的问题,提出了一种基于静电驱动的静电力反馈方法.该方法一方面将质量块位移锁定在最佳工作点,提高加速度计的线性度;同时利用静电力反馈实现微米光栅加速度计的力反馈控制,提高它的动态范围.给出了微米光栅加速度计的力反馈检测原理,建立了静电力反馈控制模型和基于力反馈的微米光栅加速度计系统的数学模型,在此基础上优化了PI控制单元,搭建了微米光栅加速度计力反馈系统,实现了力反馈控制.实验结果显示:当质量块位移锁定在最佳工作点处时,微米光栅加速度计的量程比未加力反馈时增大了33.4倍,非线性度抑制了6.4倍.  相似文献   

2.
为了进一步探究微机电系统(MEMS)传感器领域中静电力对非线性振动的影响,以静电负刚度谐振式加速度计(ENSRA)为研究对象进行动力学建模和实验分析.基于哈密顿原理建立了ENSRA机电耦合的非线性振动动力学模型,分析了其高阶非线性刚度的来源,并结合实验现象探究了MEMS传感器中静电力对器件非线性振动的影响,得到了驱动力与静电力对高阶非线性刚度的一般关系.经过开环扫频实验表明,当驱动力从100mV降低到60mV时,非线性振动优化了49%,当调谐电压从10V降低到6V时,非线性振动优化了44%,输出非线性降低了将近4个数量级,器件整体性能大幅提升,有效改善了二阶非线性刚度项导致的谐振器刚度软化和谐振峰的左偏现象.  相似文献   

3.
高灵敏度电容式位移检测是实现静电悬浮微加速度计闭环测控的关键技术之一.针对微加速度计径向悬浮检测的特点及指标要求,设计了高灵敏度、高精度电容式微位移检测通道.该通道主要由前置RC隔离网络与C/V转换、高共模抑制比差动放大器、二级运放、二阶压控电压源有源带通滤波、相敏解调(含模拟乘法器与四阶Butterworth低通滤波...  相似文献   

4.
对于电阻式应变传感器,灵敏度是衡量传感器测量精度的重要指标之一。对现有电阻式应变传感器结构进行优化使其灵敏度提高,从而可提高电阻式应变传感器测量精度。首先利用WorkBench有限元软件和数值理论,计算电阻式应变传感器的灵敏度理论值,接下来基于拓扑软件以质量降低50%和最大应力不超过材料许用应力为约束条件进行拓扑优化。最后对拓扑优化后电阻式应变传感器结构进行灵敏度理论计算。研究结果表明,拓扑优化后电阻式应变传感器的灵敏度为2.57 mV/V,原有的结构灵敏度为2.25 mV/V,拓扑优化后的灵敏度比原有有利提高了14.2%。  相似文献   

5.
高精度静电悬浮加速度计可作为海空重力测量仪器中的核心传感器,检验质量的位移检测电路是加速度计控制系统的核心,其精度直接影响了加速度计零偏和标度因数的稳定性,因此需要研究分辨率高、噪声小的位移检测系统。针对高精度静电悬浮加速度计的地面应用需求,以大表面积质量比的敏感探头结构为测量对象,设计了基于差动电容的位移检测电路,建立了电容检测电路的数学模型,对电路误差源进行了系统分析。实验结果表明,该电路能够有效地抑制悬浮高压引入的耦合误差,减小电路噪声。当电路工作在零点附近,20kHz内的噪声小于2×10-6V/Hz1/2,对应电容检测分辨率为2.93×10-5pF/Hz1/2,能够满足地面应用静电加速度计对位移测量精度的要求。  相似文献   

6.
模态匹配和力反馈控制可以在不牺牲检测带宽的情况下,利用机械谐振放大特性有效提高微机电陀螺信噪比、改善陀螺性能。结合一款高Q 值对称式四质量敏感结构的陀螺表头,在陀螺动力学平均模型基础上,通过对检测模态同相分量和正交分量的控制,实现陀螺的闭环检测控制。基于静电负刚度原理,通过改变陀螺敏感结构梳齿与质量块之间的电压,构建实时正交抑制系统和精确模态匹配环节,推导出陀螺的静电刚度矩阵,完成了对正交耦合信号的实时抑制和驱动、检测模态的精确模态匹配并且实现对两环节的解耦控制。实测结果显示,陀螺频差由24 Hz缩小到0.05 Hz以内,全温条件下,陀螺的正交耦合量由3(°)/s抑制到0.01(°)/s,陀螺全温零偏稳定性由初始的11.48(°)/h改善到1.95(°)/h,验证了实时正交抑制和模态匹配等技术对提升陀螺性能的具体效果。  相似文献   

7.
单片压电式加速度计采用对称四边梁结构,中间放置一个检测质量块,定性与定量分析加速度计算结构,用定元法模拟静态模式,模拟分析不同加速度计的机械响应,模拟结果显示该加速计可以传感三个轴向模拟加速度,理想状态下X、Y、Z-轴向灵敏度约为21mv/g,15mv/g,和15mv/g。并且耦合灵敏度近似为零,与理论计算相符。某些结构优化后还能改善加速度计的性能。  相似文献   

8.
本文提出了一种惯导系统中加速度计信息采集的V/F方案,其将加速度计输出的电流信号通过采样电阻转化成电压信号,再由高精度V/F芯片进行电压信号到频率信号的转换,然后通过FPGA计数、同步、补偿并最终输出.整个方案的实现过程简单,电路体积小,成本低,非常适用于导弹及鱼雷等捷联惯导系统应用领域.实验证明,该方法提高了加速度计...  相似文献   

9.
设计了一种标准CMOS工艺下的低电压带隙基准电路,该电路使用了温度的二阶曲率补偿技术,使输出电压达到了较低的温度系数.HSPICE的仿真结果表明,该电路在-20℃~120℃的温度范围内,输出电压变化为500uV,在1.0V~1.8V的电源电压范围内,输出电压为284.6±0.3 mV,电压抑制比约为60dB,最低工作电压接近于1V,在1.3V的电源电压时,总共耗为5uW,适合于低电压低功耗领域的应用.  相似文献   

10.
光纤传感器发展很快,它作为测量元件被应用到惯性技术中,除光纤陀螺外,光纤加速度计的应用成为必然。光纤加速度计与机电加速度计相比,精度高,灵敏度好,它集光机电技术于一体。文中简述了开环和闭环光纤加速度计的工作原理,技术难点,及应用前景。  相似文献   

11.
An adaptive velocity controller for a permanent-magnet synchronous motor without using shaft sensor is presented. Two line-to-line voltages and two stator currents are sensed to produce the flux position. The design part is concerned with the formulation of control algorithm for current-regulated pulsewidth modulated inverter and vector control strategy for speed loop. Under the vector control framework, self-tuning, model following, and model referencing adaptive control are applied to design for the speed-loop controllers. The implementational part integrates the control of current and speed loop using microprocessor-based controllers. Experimental case studies that correlate simulation and measurement results are provided. The experimental results validate the theoretical development. A new approach for designing advanced adaptive controller for a sensorless ac drive is provided  相似文献   

12.
Microscope Instrument Development,Lessons for GOCE   总被引:2,自引:0,他引:2  
Touboul  Pierre 《Space Science Reviews》2003,108(1-2):393-408
Two space missions are presently under development with payload based on ultra-sensitive electrostatic accelerometers. The GOCE mission takes advantage of a three axis gradiometer accommodated in a very stable thermal case on board a drag-free satellite orbiting at a very low altitude of 250 km. This ESA mission will perform the very highly accurate mapping of the Earth gravity field with a geographical resolution of 100 km. The MICROSCOPE mission is devoted to the test of the “Universality of free fall” in view of the verification of the Einstein Equivalence Principle (EP) and of the search of a new interaction. The MICROSCOPE instrument is composed of two pairs of differential electrostatic accelerometers and the accelerometer proof-masses are the bodies of the EP test. The satellite is also a drag-free satellite exhibiting a fine attitude control and in a certain way, each differential accelerometer is a one axis gradiometer with an arm of quite null length. The development of this instrument much interests the definition and the evaluation of the sensor cores of the gradiometer. The in flight calibration process of both instruments is also very similar. Lessons form these parallel developments are presented. This revised version was published online in August 2006 with corrections to the Cover Date.  相似文献   

13.
A frequency modulated UHF telemetry link giving 5 MHz of baseband capacity with carrier to noise ratio exceeding 30 dB is described. The system is intended for ground mobile use and provides more than 1 km of coverage also in moderately obstructed terrain indicating allowable maximum path loss up to 110 dB. The mobile transmitter end uses a sturdy flexible antenna. Typical sensor signals include voltage outputs from accelerometers, strain gauges, and thermistors, but live broadcasting-quality television is also easy to implement. Digital interfacing is accomplished through suitable D/A converters, multiplexers, and coders. Both the transmitter and receiver utilize commercial-off-the-shelf building blocks in order to keep the total cost within acceptable limits.  相似文献   

14.
静电悬浮微机械加速度计通过静电力把质量块无接触的悬浮起来,具有极高的分辨率.一般采用差动电容式位移检测的方式来精确检测质量块在电极腔内的运动,然后在通过悬浮控制系统来实现六自由度的有源悬浮.针对该电容的检测,本文介绍了一种基于环形二极管解调的单频载波公共激励电极电容式多路位移检测方案,并进行了设计仿真与实验测试,实验测...  相似文献   

15.
There is no general consensus of opinion about the future of micromechanical gyroscopes and accelerometers. According to the pessimistic estimation, micromechanical gyroscopes and accelerometers have attained the limit of their accuracy. However, optimists believe that micromechamical gyroscopes will soon occupy the niche of fiber-optical gyroscopes and the latter will press laser gyroscopes. The present-day development of micromechanical gyroscopes and accelerometers is aimed at improving the basic and minor parameters: sensitivity, bias, offset, drift, resolution, scale factor, and its non-linearity. High level of performance is provided by application of high technology. This is devoted to the development and manufacturing of "silicon-glass" micromechanical sensors of encapsulated-type with digital output processing. The key technological processes allowing production of micromechanical encapsulated sensors with vacuum insides are considered and the features of their design are described. The methods for maintaining high reliability of encapsulated micromechanical gyroscopes with inner getter structure are discussed. ASIC designs for control and processing of micromechanical sensor outputs allow their accuracy, which is part of modern integrated systems, to be considerably improved. Also considered are various assemblies and packaging of the ASIC and micromechanical sensor as a single product.  相似文献   

16.
提出了一种基于改进LS-SVM的航空发动机传感器故障诊断与自适应重构控制方法.该方法通过给误差变量赋予不同权值因子提高LS-SVM的鲁棒性,采用修剪算法提高LS-SVM的稀疏性;该方法从某涡扇发动机输入输出空间中建立其正常模型,采用阈值判别法对传感器故障进行实时监视与诊断,并用模型输出值代替故障传感器测量值反馈回闭环控制系统,实现对发动机的自适应重构控制.仿真结果表明,该方法能及时准确地定位故障,并进行有效的自适应重构控制.  相似文献   

17.
Circular thin-plate electrostatic sensors are promising in gas path monitoring due to their advantages of non-intrusiveness and easy installation. The spatial sensitivity and filtering effect are two important performance parameters. In this paper, an analytically mathematical model of induced charge on a circular thin-plate electrode is first derived. Then the spatial sensitivity and filtering effect of the circular electrostatic sensor are investigated by numerical calculations. Finally,experimental studies are performed to testify the theoretical results. Both theoretical and experimental results demonstrate that circular thin-plate electrostatic sensors act as a low-pass filter in the spatial frequency domain, and both the spatial filtering effect and the temporal frequency response characteristics depend strongly on the spatial position and velocity of the charged particle. These conclusions can provide guidelines for the optimal design of circular thin-plate electrostatic sensors.  相似文献   

18.
针对PID控制器参数固定而引起永磁同步电机(PMSM)位置伺服系统控制效果不佳问题,设计了基于细菌觅食优化算法的模糊控制器。该位置控制系统是以空间矢量控制为理论基础,由位置环、速度环、电流环构成的PMSM三闭环控制系统。在MATLAB/Simulink环境中将模糊控制器应用在系统位置环上。对比仿真结果发现,参数优化后的模糊控制器在系统位置环的作用更加优越,完全克服了传统PID控制器的缺点,能有效提高电机位置控制的快速性和准确性。  相似文献   

19.
A fault processing policy was proposed for the circumstance under which all the dual-redundant closed-loop feedback control sensors went wrong. This policy was based on dual-redundant control law and may maintain the performance of turbofan engines. When pair of controlling sensors went wrong and the primary control law was unable to implement, control system performs the backup control law instead of the primary one so that the fault sensors were isolated from the closed control loop. This fault processing policy may not only avoid increasing engine weight and cost with the additional sensors hardware, but also avoid the error of analytical sensor signal. It can improve the engine mission reliability and control quality.  相似文献   

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