宇航计测技术 ›› 2020, Vol. 40 ›› Issue (3): 46-50.doi: 10.12060/j.issn.1000-7202.2020.03.10

• 量值传递技术 • 上一篇    下一篇

在片校准标准件基底边界条件影响

霍晔1；王一帮1；吴爱华1；杜静2；栾鹏1；张晓云1   

  1. 1.中国电子科技集团公司第十三研究所，河北石家庄 050051； 2.解放军陆军步兵学院石家庄校区，河北石家庄 050083
  • 出版日期:2020-06-25 发布日期:2022-03-05
  • 作者简介:霍晔（1989.04-)，男，助理工程师，本科，主要研究方向：无线电计量技术。

The Influence of Calibration Substrate Boundary Conditions to On-wafer Calibration Standards

HUO Ye1；WANG Yi-bang1；WU Ai-hua1；DU Jing2；LUAN Peng1；ZHANG Xiao-yun1   

  1. 1.The 13th Research Institute of China Electronics Technology Group Corporation,Shijiazhuang 050051,China;
    2.Shijiazhuang Division of Army Infantry Collage of PLA,Shijiazhuang 050083,China
  • Online:2020-06-25 Published:2022-03-05

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摘要： 通过分析国内外校准标准件物理边界条件，研究不同校准基底的物理边界条件对共面波导（CPW）传输线特性和校准准确度的影响。研制了W波段砷化镓衬底的多线TRL在片校准标准件，将在片校准标准件分别放置在金属卡盘、玻璃片、吸波材料三种校准基底上。用三种不同校准基底的校准标准件对试验装置校准后，分别提取了CPW传输线的衰减常数、相对介电常数和特征阻抗，并对商用校准标准件104-783A的短路标准和传输线标准进行了测试，验证了结果的合理性。

关键词: 在片校准, 校准标准件, 边界条件, 共面波导, 传输线

Abstract: Throught international research of calibration substrate boundary conditions is analyzed.The influence of different calibration substrate boundary conditions on the characteristics and calibration accuracy of coplanar waveguide(CPW)transmission lines is introduced.A multi-line TRL on-wafer calibration standards for W band GaAs substrate was developed,it is placed on metal chuck,glass and absorbing material.After calibrating the system with three calibration standards with different calibration substrates,the attenuation constants,relative permittivity and characteristic impedance of CPW transmission lines are extracted respectively,the short standard and transmission line standard of commercial calibration standards 104-783A are tested to verify the rationality of the results.

Key words: On-wafer calibration, Calibration standards, Boundary conditions, CPW(Coplanar Waveguide), Transmission lines

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