关键词: 传感器技术, 系统级设计, 多端口组件网络, 微加速度计, 建模与仿真

Abstract: A method for modeling and simulation of MEMS based o n multiport-element network is presented. Witht his met hod, the functional compo nents of iner tial MEMS are modeled as multipor t-elements and a crab-leg accelerometer is represented as a network composed o f these models. All the models are coded in analogy hardw ar e description language of MAST and simulated on t he Saber simulator. With this approach the system behav ior can ber apidly analyzed and the influence of its parameters on system performance can be evaluated. Simulation of modalfrequency of the crab-leg accelerometer model ag rees to that of the finite element analysis( wit hin 1.0%) . Simulation results indicate that the system sensitivity is seriously influenced by t he w idth of the crab-leg beam, so the fabrication error of t he beam width should be reduced as much as possible. The system responses to sinusoidal and pulseinput sig nals are also investig ated.

Key words: transducer technology, system level design, multi-port-element network, micromachined accelerometer, modeling and simulation