| 摘要: |
| 设计了一种基于绝缘体上铌酸锂（LNOI）的片上多模干涉（MMI）波导功率分束器，在5μm×45μm的小尺上实现了1×2的片上分束功能，且满足集成化光纤陀螺的光路应用要求。通过理论公式和有限时域差分法对器件进行了关键参数计算和光场仿真，MMI干涉区长度为20μm，优化输出分支间距并增加宽度为1.7μm的锥型波导后，在100nm的光谱宽度中，功率分束器的归一化输出光强较为平坦，最低规一化输出光强为0.965，两输出分支的光功率不均匀度仅为10-4量级。 |
| 关键词: 集成化光纤陀螺 功率分束器 LNOI MMI 有限时域差分 |
| DOI： |
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| 基金项目:“十四五”装备预研项目（50917060401）; 航天科工集团重大自主创新项目（C041gjdx） |
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| Research on LNOI-Based Power Splitter for Integrated Fiber-Optic Gyroscope |
| LI Hao-wei,LEI Ming,ZHANG Tian-qi,YU Xiao-zhi,ZHANG Li-zhe,FENG Zhe |
| (Beijing Institute of Automatic Control Equipment, Beijing 100074, China) |
| Abstract: |
| A multimode interference(MMI) power splitter based on lithium niobate on insulator(LNOI) is designed. The 1×2 MMI splitter is demonstrated on a small region of 5μm×45μm. The splitter meets the optical requirements of integrated fiber optic gyroscope. Through theoretical formula and finite difference time domain method, the key parameters of the device are calculated and the light field simulation is carried out. The length of MMI interference area is 20μm.After optimizing the distance between output branches and adding the tapered waveguide with a width of 1.7μm, the normalized output intensity of the power splitter is relatively flat in the spectral width of 100nm, with the lowest output intensity of 0.965, and the optical power unevenness of two output branches is only 10-4 orders of magnitude. |
| Key words: Integrated fiber optic gyroscope Power splitter LNOI MMI Finite difference time domain |
